• CHA 600 RAP Electron Beam Evaporator

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    Description

    CHA 600 RAP Electron Beam Evaporator
    4 Pocket CHA electron beam gun. Temescal CV-8 Power supply with XYS sweep.
    substrate heat via quartz lamps.
    Substrate flip fixture installed.
    Deposition control via a Telemark 861 deposition controller.
    Dual xtal head.
    Dual ionization gauge controller with dual convectron gauges.

    Used to evaporate Gold and Titanium.
    Cryogenic pump: 8″ CTI
    Mechanical pump: 23-57 CFM, dual stage
    Cold trap: 2.5 liter capacity, 200 sq. inches of surface area, 10 hours holding time

    High vacuum valve: 7-3/4″ I.D., seals vertically
    Foreline/Roughing valves: 3″ I.D.
    Valve actuation: Electro-pneumatic (all vacuum valves)
    Valve sequencing: Manual and automatic (Auto-Tech II)
    Ionization gauge control: Dual ionization gauge tube, auto ranging with dual convectron positions.
    Dimensions: 79″H x 43″W x 37″D
    Weight: 1,200 pounds
    Utilities
    Electrical: 208/10/70A/4-wire connection with ground (3 phase, 5-wire also available)
    Water: 10 GPM (minimum)
    Air: 90-110 PSIG
    1200 lbs evaporator, 650 lbs CV8 PS, 100 1bs mechanical pump, 75 lbs Helium compressor.

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