• Onto Innovation Rudolph Technologies F30™ System Defect Inspection Machine

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    Description

    Onto Innovation Rudolph Technologies F30™ System
    Defect Inspection Machine

    ONTO / RUDOLPH / AUGUST F30 Defect Inspection.

    -Platform is specified for ISO5
    -Filter wheel with color selection (RGB)
    -1x, 3x, 5x, 10x , 20x review
    -Has a OCR reader
    -Dark field function implemented
    -It can use the Discovery/True ADC software for offline review
    -CD measurements are possible, but there is no separate optic available for this
    -Bare wafers only. Must be modified if sawn wafers are on frame.

    Manufacturer Catalogue Information about
    Onto Innovation Rudolph Technologies F30™ System : 

    Designed to blur the lines between dark field micro inspection and traditional macro inspection, the F30 System provides automated defect inspection for front-end and outgoing quality (OQA) applications.

    Product Overview

    The F30 System boasts a five-objective turret that enables the resolution-throughput flexibility required by today’s multi-process inspection applications. Equipped with an advanced productivity suite (waferless recipe creation, simultaneous FOUP, recipe server and tool matching), the F30 System redefines inspection cost of ownership expectations.

    Applications

    After develop inspection (ADI)
    Fab Outgoing QA
    Post CMP inspection
    After etch inspection
    Specifications

    Throughput up to 120 wph (10µm)
    Resolution flexibility (10µm to 0.5µm)
    Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer
    Teams with edge and backside modules for all-surface solution

    Related Products & Markets

    EB40 Module
    Edge and backside inspection

    Discover Defect Software
    Inline yield and defect management

    TrueADC Software
    Automated defect classification software with a dynamic defect library

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